| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink-jet recording head which can maintain a high frequency discharge movement in a stable state for a long period by providing a substrate for a recording head which has been improved in a thermal conductivity, a residual stress profile and structural stability better than before. SOLUTION: Alpha-Ta made to change structurally from beta-Ta is arranged in the just upper part of a heating resistor at least. Thereby, the substrate for a recording head which has been improved in the thermal conductivity, a residual stress profile and structural stability is provided, and the ink-jet recording head which can maintain the high frequency discharge movement in the stable state for a long period is obtained. COPYRIGHT: (C)2009,JPO&INPIT
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