| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coating method which prevents the deformation of a center cap and the generation of bubbles in a resin layer in a course of removing a center cap in a spin coat step. SOLUTION: The spin coating method comprises keeping apart the center cap and a disc substrate at first so that the center cap and the disc substrate are in a state of non-contact. Then, the center cap is removed after the center cap has been kept apart from the disc substrate. In this occasion, even if the center cap is lifted in a inclined state, excessive force is not added between the center cap and the disc substrate, and the center cap does generate the deformation and the like because the center cap and the disc substrate are already in a non-contact state. COPYRIGHT: (C)2009,JPO&INPIT
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