| 摘要 |
PROBLEM TO BE SOLVED: To enhance the sensitivity of a photodiode, an F-number characteristic and a luminance shading characteristic by setting the focal point of condensed light nearly on the surface of the photodiode while also directing an oblique ray L2 having a large incident angle on the photodiode. SOLUTION: A first-layer convex microlens 8 having a refractive index larger than that of upper and lower interlayer dielectrics and a second-layer concave microlens 9 having a refractive index smaller than that of the upper and lower interlayer dielectrics are provided between a microlens 7 and a photodiode 1. Light incident to each pixel is condensed by a microlens 7, bent toward the center of the photodiode 1 by the first-layer microlens 8, and further bent toward the center of the photodiode 1 by the second-layer microlens 9. COPYRIGHT: (C)2009,JPO&INPIT
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