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经营范围
发明名称
TERNARY ALUMINUM ALLOY FILMS AND TARGETS
摘要
申请公布号
EP2002027(A1)
申请公布日期
2008.12.17
申请号
EP20070754298
申请日期
2007.03.28
申请人
PRAXAIR TECHNOLOGY, INC.
发明人
SARKAR, JAYDEEP;LO, CHI-FUNG;GILMAN, PAUL, S.
分类号
C23C14/34;C03C17/09;C22C21/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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