AUTO COUNT SYSTEM FOR MEASURING DIRECT SURFACE OXIDE DEFECT AND METHOD THEREOF

摘要

An auto count system for measuring direct surface oxide defect and an auto count method thereof are provided to increase the measurement reliability by using the computer program. An auto count system for measuring direct surface oxide defect comprises the stage part(410), the image acquisition part(420), the A/D converter(425), the image data processor(430). The stage part supports the test object wafer in which the oxide film is formed. The image acquisition part takes a photograph of the surface of the test object wafer and produces the surface image. The A/D converter converts the surface image generated from the image acquisition part into the digital image information. The image data processor stores the characteristic information of the oxide film deformity of the standard wafer.