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发明名称
摘要
申请公布号	JPS4837089(A)	申请公布日期	1973.05.31
申请号	JP19710070398	申请日期	1971.09.13
申请人		发明人
分类号	H01L21/205;H01L33/10;H01L33/30;H01L33/34;H01L33/40;H01S5/00	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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