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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
US3827966(A)
申请公布日期
1974.08.06
申请号
US19720319389
申请日期
1972.12.29
申请人
LUCAS AEROSPACE LTD,GB
发明人
NEEDHAM V,GB
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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