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发明名称
摘要
申请公布号
JPS50103279(A)
申请公布日期
1975.08.15
申请号
JP19740005948
申请日期
1974.01.11
申请人
发明人
分类号
H01L21/76;H01L21/283;H01L21/331;H01L29/73
主分类号
H01L21/76
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