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发明名称
CVD SOCHI
摘要
申请公布号
JPS51879(A)
申请公布日期
1976.01.07
申请号
JP19740070216
申请日期
1974.06.21
申请人
HITACHI LTD
发明人
INANIWA KEIZO;WATANABE MAKOTO
分类号
H01L21/22;H01L21/205;H01L21/225
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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