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发明名称
PERETSUTOBONDEINGUHOHO
摘要
申请公布号
JPS5161775(A)
申请公布日期
1976.05.28
申请号
JP19740135458
申请日期
1974.11.27
申请人
HITACHI LTD
发明人
IKUMI MASUZO;MAEJIMA HIROSHI
分类号
H01L21/52;H01L21/58;H01L29/06
主分类号
H01L21/52
代理机构
代理人
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地址
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