Workpiece feed for ion beam processing - has housing containing rotary mounted feed and frame about axis at given angle to ion beam

摘要

The device housing has a window for ion beam passage, which can be covered by a door with sensors controlling the distribution of the ion current on target surface. The feed is mounted in a frame (35) which is rotatable, together with the feed, in the housing (26) about the frame long axis. The latter passes through the treated workpiece under an angle to the ion beam (3) axis, thus enabling the workpiece to be treated all round without changing the direction of the ion beam. In this manner the other parts and gears driving the feed and frame are kept away from the effective range of the ion beam. Preferably the feed is in the form of a drum (33) mounted on a hub (34) rotatably mounted in the frame.