VERFAHREN ZUR HERSTELLUNG EINKRISTALLINER SILICIUMSTAEBE

摘要

A process for the production of a monocrystalline silicon rod by withdrawal from a silicon melt in a drawing chamber by means of a drawing spindle, comprises passing a stream of a protective gas, such as argon, into said chamber during the drawing operation and through a tube which surrounds the drawing spindle and the growing silicon rod, the chamber being maintained under reduced pressure.