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发明名称
摘要
申请公布号
JPS5247422(Y2)
申请公布日期
1977.10.27
申请号
JP19720097264U
申请日期
1972.08.19
申请人
发明人
分类号
B01F11/00;B01F3/12;B32B17/00;C03C17/04;H01L21/00;H01L21/31;H01L21/316;H01L21/56;H01L23/02;(IPC1-7):H01L23/02
主分类号
B01F11/00
代理机构
代理人
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