发明名称 Machine for changing the spacing of a plurality of wafers
摘要 A machine for changing the spacing of a plurality of wafers comprises a plurality of wafer receiving surfaces initially having a first spacing associated therewith. The wafer receiving surfaces cooperatively engage with means which, when activated, move the plurality of wafer receiving surfaces so that they have a second spacing associated therewith.
申请公布号 US4108323(A) 申请公布日期 1978.08.22
申请号 US19770837419 申请日期 1977.09.28
申请人 RCA CORPORATION 发明人 SHAMBELAN, ROBERT CHARLES;LINDSLEY, CHARLES WESLEY
分类号 B65G65/00;H01L21/677;(IPC1-7):B65G65/04 主分类号 B65G65/00
代理机构 代理人
主权项
地址