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发明名称
Vacuum deposition apparatus
摘要
申请公布号
GB1026676(A)
申请公布日期
1966.04.20
申请号
GB19630002201
申请日期
1963.01.17
申请人
ALLOYD ELECTRONICS CORPORATION
发明人
分类号
C23C14/54;H01J37/304;H01J41/04
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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