发明名称 |
Vacuum coating apparatus having a plurality of lock chambers |
摘要 |
Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.
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申请公布号 |
US4184448(A) |
申请公布日期 |
1980.01.22 |
申请号 |
US19780963062 |
申请日期 |
1978.11.22 |
申请人 |
LEYBOLD HERAEUS GMBH |
发明人 |
AICHERT, HANS;DIETRICH, WALTER;HAUFF, ALFRED;STARK, FRIEDRICH;STEPHAN, HERBERT |
分类号 |
B01J3/00;C23C14/56;(IPC1-7):C23C13/08 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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