发明名称 Semiconductor device and a method for manufacturing the same
摘要 A semiconductor device comprises a semiconductor substrate, an insulating layer formed on one surface of the semiconductor substrate, a wiring layer formed on at least a portion of that area of the semiconductor substrate where no insulating layer is formed and having substantially the same thickness as that of the insulating layer, an insulating film formed flat on the insulating layer and wiring layer in a manner that it occupies grooves between the insulating layer and the wiring layer, an intermediate insulating layer formed on the insulating film, and another wiring layer formed on the intermediate insulating layer. The semiconductor device has a rupture-free multi-layer structure which exhibits an excellent electrical property.
申请公布号 US4185294(A) 申请公布日期 1980.01.22
申请号 US19780897198 申请日期 1978.04.17
申请人 TOKYO SHIBAURA ELECTRIC CO LTD 发明人 OHASHI, YOSHIE;SUMITOMO, YASUSUKE
分类号 H01L21/316;H01L21/768;H01L23/31;H01L23/528;(IPC1-7):H01L29/34;H01L23/30;H01L23/48 主分类号 H01L21/316
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