SCANNING TYPE ELECTRON MICROSCOPE

摘要

PURPOSE:To avoid the rotation of sample image on cathode-ray tube by scanning electron beam so that the direction of laster is rotated in a direction that the rotation in the laster direction due to the change in excited current for object lens is negated. CONSTITUTION:Secondary electron or reflecting elecron generated from a sample 4 by the scanning of electron beam is detected by a detector 8 and then supplied through a image amplifier 9 to a cathode-ray tube 10. Scanning signal is supplied to deflecting coils 11X and 11Y of the cathode-ray tube 10 and the scanning image of the sample 4 is displayed on the cathode-ray tube 10. In case where the excited current of a object lens 3 is changed by the change in the position of the sample 4, the rotation of sample image on the cathode-ray tube can be avoided by scanning electron beam so as to rotate the laster direction concurrently.