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发明名称
摘要
申请公布号
JPS4114985(Y1)
申请公布日期
1966.07.13
申请号
JP19650104940U
申请日期
1965.12.24
申请人
发明人
分类号
H01L21/60;H01L23/48;(IPC1-7):H01L23/48
主分类号
H01L21/60
代理机构
代理人
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