摘要 |
<p>PURPOSE:To reduce permittivity and to make characteristic per time of temperature coefficient of resannnce frequency of a piezoelectric oxide material to favorable by a method wherein the piezoelectric material is constituted with an oxide consisted of Pb, Ca, W, Ti, O and Co or Ni or Mg having the prescribed composition ratio. CONSTITUTION:The piezoelectric material is constituted with an oxide represented by the general expression of (Pb1-yCay)[Me1/2W1/2)xTi1-x]O3 (provided that Me is either one of Co, Ni, Mg), and having the fundamental composition of 0.10<=y<=0.30, 0.01<=x<=0.10, and moreover Zn of 0.2-3.0wt% is made to be contained as the subsidiary component. Accordingly the piezoelectric oxide material having small permittivity, being temperature coefficient of resonance frequency thereof within+ or -20ppm and having superior characteristic per time, and bing suitable for surface wave, can be obtained.</p> |