| 摘要 |
PURPOSE:To form a carbon film having physical properties similar to those of diamond by irradiating graphite as a base material with ion beams to form a film by sputtering and by irradiating the film with charged corpuscles. CONSTITUTION:A vacuum vessel is evacuated to a high vacuum, and an inert gas is introduced into an ion source 2 to produce ions by discharge. The ions are accelerated to about 5kV and extracted as ion beams 3, and by irradiating a graphite plate 4 with the beams 3, carbon atoms of the plate 4 are sputtered and deposited on a substrate 5 to form a thin film. At the same time, ion currents 9 accelerated to several 10V with an ion gun 8 are hit against the substrate 5, and the substrate 5 is further irradiated with electron currents 11 accelerated to several 10V with an electron gun 10. As a result, the depositing carbon atoms are activated and densely packed. Accordingly, a carbon film with high light transmittance, electric resistance and hardness similar to diamond is formed. |
