CHARGED PARTICLE ACCELERATOR

摘要

PURPOSE:To enhance the pour efficiency of charged particles, and facilitate the operation and regulation of a charged particle accelerator by acanning the charged particles by means of a rotating magnetic field or a rotating electric field. CONSTITUTION:A beam line 14 is provided with a rotating magnetic field generator 13. When symmetrical polyphase current is fed to the coil of the generator 13, a circular rotating magnetic field is developed. When thus developed circular rotating magnetic field is applied to charged particles A traveling forward within the beam line 14, the charged particles A extend in the radial direction of the beam line 14 while rotating. The radius of the extention of the charged particles A is changed by changing the strength of the above circular rotating magnetic field, and the particles A are poured into a wafer in spiral form.