| 摘要 |
PURPOSE:To enable to perform a high-precise inspection of a surface defect without being affected by unevenness in sensitivity of a photoelectric converter, by a method wherein a scanning point photo image, transmitting a slit plate on an image formation, is inputted to a collecting surface of a photoelectric converter in a manner that the image is widened. CONSTITUTION:light outputted from a projector 11 is light-scanned gradually from one terminal A in a direction of a width of a surface of an object 13 to be inspected to the other terminal B. A scanning point photo image of irregular reflection component from the surface of the object 13 to be inspected is focused by a focusing lens 14 to form an image on a slit part in a slit plate 15, an unnecessary reflecting photo image is removed and only a scanning point photo image transmits. A scanning point photo image, transmitting the slit plate 15, is inputted to a collecting surface of a photoelectric converter 17 in a manner that the image is optically widened. This permits fetching of an inspecting signal, having no uneveness in sensitivity, through compensation of an uneven coating of a photo electric converting material and a difference in an amplifying rate of a collecting position, and enables the reliable respection of a defect on an object to be inspected. |
