| 摘要 |
<p>PURPOSE:To obtain a semiconductor device of a multilayer structure which is easy to test, by laminating each layer with the area reduced in stages, and by providing a measuring electrode on the exposed surface of each layer. CONSTITUTION:Epitaxial layers 1-4 whereon circuit elements are formed respectively are laminated in multilayer through the intermediary of insulation layers 5. The area of each layer is reduced in stages, and on the surfaces thus exposed measuring electrodes 1a-4a are provided. A test is conducted by a method wherein a probe 8 connected to a testing device 6 via a relay switch 7 is made to contact with the measuring electrodes. This constitution facilitates the test of each layer and of the whole device.</p> |
