| 摘要 |
PURPOSE:To obtain a magnetic tape with high quality cntinuously, by providing an ion accelerating electrode at the back side of a substrate through insulation from the substrate for cooling a polymer film, in forming a ferromagnetic metal thin film vapor-deposition layer on a long-sized polymer film with an ion plating method. CONSTITUTION:A high film 4 is supplied from a supply roll 5 and wound on a winding reel 6 via a guide roll 7 while the film is cooled at a cooling substrate 10 (cooled with a refrigerant pipe 12) via a guide roll 8. An acceleration electrode 9 is arranged at the back side of the base 10 via an insulator 11, Co- evaporated particles from an E-gun evaporation source 13 are ionized with thermal electrons accelerated at a vapor ionizer 14, made incident onto the polymer film 4 to form a ferromagnetic thin film. The film 4 is strongly attracted staticelectrically to the insulated base 10, allowing to obtain a magnetic tape with excellent quality through stable running continuously without deformation. |
