| 摘要 |
PURPOSE:To aim at compactification in form, by vacuum evaporating getter materials such as titan, etc., directly to a heat shield in use for protecting a super cold cryogenic surface. CONSTITUTION:A first heat shield 10 in use for protecting a super cold cryogenic surface from heat radiation out of ordinary temperature wall parts is installed inside a first vacuum vessel 9 while a second heat shield 11 is made up in the inner part of this heat shield 10. The surface of the first heat shield 10 facing the ordinary temperature wall, as a vacuum evaporated base plate, is directly vacuum evaporated with the getter material from a sublimation source 4, spreading a getter film over the surface of the first heat shield 10. And, a cryogenic surface 6 is disposed inside the second heat shield 11 and in front of that, a shevron baffle 8 is installed. Then, the first vacuum vessel 9 is interconnected to the second vacuum vessel 3 to obtain the desired vacuum pressure. As the above, compactification in form, reliability and the operability factor are all improved. |
