| 摘要 |
PURPOSE:To detect 0-100% relative humidity and gaseous alcohol selectively with high sensitivity by a mixture consisting of an apatite ceramic material and a metallic oxide between the separating electrodes provided on an element substrate consisting of said ceramic mterial and ruthemium oxide. CONSTITUTION:The 1st, the 2nd electrodes 2, 4 are provided via a apatite ceramics to an element substrate 1 consisting of an apatite ceramics. The 3rd electrode is provided apart from the electrode 2, and a mixture 5 of one kind among titanium oxide, niobium oxide, tin oxide, zinc oxide and magnesium ferrite and ruthenium oxide is provided between the electrodes 2, 3 in contact with the electrodes 2, 3. Thus, 0-100% relative humidity is detected with the substrate 1 and gaseous alcohol with the mixture 5 selectively with high sensitivity. |
