AUTOMATIC ENERGY DISPERSIVE X-RAY FLUORESCENCE ANALYSING APPARATUS

摘要

An improved method and apparatus for obtaining and displaying SEM x-ray line scans and maps for data collection and presentation in energy dispersive x-ray analysis of materials, having ratemeter circuitry providing a voltage output proportional to the intensity of detected pulses in an energy window and an absolute digital representation of the intensity count rate both corrected for dead time, input multiplexing and multiple output buffering of the ratemeter to accommodate multiple channel signals, a feedback loop from said ratemeter to provide display image enhancement, inhibit circuitry to eliminate background signals, signal averging circuitry to permit storage of multiple line scan of multiple single channel analyser outputs in a multi-channel analyser for later processing and display circuitry for displaying stored line scans.