| 摘要 |
PURPOSE:To measure minute sizes of 1mum or less simply and accurately, by computing the size of a sample image from one end to the other end of the image, based on the amount of change in a current. CONSTITUTION:The following means and devices are provided in a scanning type electron microscope: a means, which controls a current that is supplied to a means generating a DC magnetic field that is superimposed on a deflecting manetic field for an electron beam 1; an operating device 21, which operates a quantity corresponding to the variation in the DC magnetic field that is varied with a current control means; a display device 22, which displays a numerical value that is obtained by the operating device 21; and a means, which displays a reference point on the screen of a cathode ray tube 35. Then, the current, which is supplied to the DC magnetic field generating means is controlled, and one end and the other end of the image of a sample 2 on the screen of the cathode ray tube 35 are aligned with the reference point. The size of the image of the sample 2 from one end to the other end is computed based on the amount of the variation in the current. In this way, the minute sizes of 1mum or less can be measured simply and accurately, only by adding a function of measuring the sizes. |
