发明名称 BONDING DEVICE
摘要 PURPOSE:To enable to perform a highly reliable bonding work by a method wherein the mutual revolution between a bonding arm and a supporting frame is restrained by a moving coil with which pressing force can be adjusted, thereby enabling to adjust the pressing force to an arbitrary extent at any desired time. CONSTITUTION:An inserting member 28 made of strong magnetic material such as steel and the like is provided on a lever 14 corresponding to a moving coil 27, and said inserting member 28 is assembled in such a manner that it is partially inserted in the moving coil 27. The moving coil 27 gives to the lever 14 the moment wich works to rotate the lever 14 in counterclockwise direction when a voltage is applied through the intermediary of the inserting material 28. When a cam 16 and a roller 15 are in a contacted state with each other, their mutual pressing force is given to the moving coil 27, and when they are separated, the pressing force with which a ball 3 will be crushed is given to the moving coil 27.
申请公布号 JPS5911636(A) 申请公布日期 1984.01.21
申请号 JP19820119866 申请日期 1982.07.12
申请人 KAIJIYOU DENKI KK 发明人 MIYOSHI HIDEAKI;HOSHIYAMA MASAAKI;TAKANO TADASHI
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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