| 摘要 |
PURPOSE:To reduce the cost of a collet by forming a recess for adsorbing a pellet in a conical shape, thereby facilitating the steps. CONSTITUTION:A recess 15 for adsorbing in vacuum a pellet 4 is formed in a conical shape at the end of a collet 1, and no corner is formed on the treated surface of the recess at all. In this manner, cutting and finishing steps can be simply performed, thereby largely reducing the cost. |
