发明名称 |
Compact plug connectable ion source |
摘要 |
A compact ion source plug connected to a socket is provided. The source uses a magnetic pole piece which includes a center pole piece and a surrounding circumferential pole piece to form an arcuate fringe field. Cathode elements and anode elements are located within the fringe field for producing a plasma. A source body terminates at one end with at least one grid and forms a plasma chamber with a base member. All of the electrical connections to the plasma generator and the gas connection are through a plug formed on the opposite side of the base member.
|
申请公布号 |
US4446403(A) |
申请公布日期 |
1984.05.01 |
申请号 |
US19820382266 |
申请日期 |
1982.05.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CUOMO, JEROME J.;HARPER, JAMES M. E.;KAUFMAN, HAROLD R. |
分类号 |
H01J37/22;C23C14/46;C23F1/00;C23F4/00;H01J27/02;H01J27/08;H01J27/14;H01J37/08;H01L21/265;(IPC1-7):H01J7/24 |
主分类号 |
H01J37/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|