| 摘要 |
PURPOSE:To attain ease of processing of mask information of a desired shape by storing trailing point and leading point on each horizontal scanning line of a mask in pairs at all times. CONSTITUTION:In storing the mask information of a prescribed shape in a memory, after storing number information 1-10 of each profile point representing the profile of the mask, each profile point is interpolated by a straight line and all crossing positions where the straight lines intersect with the horizontal scanning lines are stored. On the other hand, each profile point is classified into poles A, parallel points B and normal points C, and the poles A are decomposed into two points in parallel with the X axis and handled the same as the normal points C, and the parallel points C are processed by introducing the concept of inner and outer flags, and the leading and trailing points on each horizontal scanning line of the mask are processed so as to be stored in pairs at all times. |
