PATTERN INSPECTING DEVICE

摘要

PURPOSE:To improve the precision of inspection for a defect and to prevent an error in decision making and perform secure, high-speed pattern inspection by making a decision on a defect while positioning a pattern to be inspected during inspection. CONSTITUTION:A scanning and image pickup part 12A makes a scan on the pattern to be inspected in two dimensions and sends out its video signal successively. A reference pattern data generation part 16 generates reference pattern data corresponding to the pattern of the object of the inspection successively on the basis of reference data stored previously in a reference data memory 18. The video signal of the pattern of the object of inspection obtained by A/D conversion and the reference pattern data are compared with each other after position corrections to detect a defective candidate, whose information is sent out of a detection part 15. A control and processing part 19 makes a detailed analysis of the defect candidate information including the peripheral pattern part of the defect candidate on the basis of the reference pattern data and performs arithmetic processing to exclude defect candidates within a practically allowable error range.