| 摘要 |
PURPOSE:To improve the yield of a manufacturing process by forming the electrode film of an oscillator which shifts slightly from a circumferential edge part and fixing a weight through a hole made in a mask. CONSTITUTION:Electrode of the oscillator 6 shift slightly inwards from the circumferential edge of the oscillator. Therefore, even if the mask shifts in position to perform vapor deposition up to a side face of the oscillator, neither of electrodes on the top and reverse surfaces short-circuits. The purpose is attained even when the extent of the backward shift is slight, so the influence of a decrease in electrode surface is a little. Then, a frequency adjustment is made to only a small-strain part, so dynamic impedance never increases. |
