| 摘要 |
PURPOSE:To manufacture easily plural functioning elements by resistance heating a boat-shaped vaporization source made of raw material of the functioning element in decompressed gas to vaporize said source, forming raw material smokes of ultramicro particles and adhering them on a substrate. CONSTITUTION:An alumina substrate 14 forming a platinum thick film electrode 15 is fixed to a substrate supporting base 17 by a fixing frame 16 of the substrate at a position distant vertically by 1-4cm from a boat in a direction perpendicular to a longitudinal direction of the tungsten boat. During a steady-state of the smoke 11 consisting of ultramicro particles of tungsten oxide, a shutter 18 is opened and closed by a shutter on-off rod 19 to adhere the ultramicro particles of tungsten oxide on a surface of the substrate 14 forming the electrode 15. The substrate 14 to which the fine particles are adhered is heated, sintered to form an ultramicro particle film. Said film is divided suitably to form the functioning element consisting of plural ultramicro particle films. |
