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发明名称
Sputtering apparatus including a folded flexible conveyor
摘要
申请公布号
US3288700(A)
申请公布日期
1966.11.29
申请号
US19630318226
申请日期
1963.10.23
申请人
NORTHERN ELECTRIC COMPANY LIMITED
发明人
NEEDHAM JAMES GARLAND;DAVIES NEVILLE CARY;RANSHAW JAMES HALLAM
分类号
C23C14/34;C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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