GUIDE MEMBER FOR POSITIONING WAFER CASSETTE

摘要

PURPOSE:To enable prevention of dust generation by a method wherein the titled member is composed of an upright part installed to the base to support a wafer cassette and an inclined part, extending integrally with the upright part bent in the manner to keep away from the leg inside surface of the wafer cassette. CONSTITUTION:The guide member 5 has the upright part 6 screwed 8 to the side surface of the base 4 such as a sender to support the wafer cassette 2. This upright part is partly in contact with the inside surface of the leg 3 of the cassette, and can fix the cassette into a position so as to prevent its break in the length and width directions. The guide member has the inclined part 7 extending integrally with the upright part bent so as to keep away from the leg inside surface of the cassette. Since this inclined part keeps a gap to avoid contact with the inside surface of the leg at the time of loading the cassette to the sender and the like or removing it, there is no possibility of dust generation. Further, a curved recess 9 is formed in the inclined part of guide member.