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发明名称
Verfahren zum elektrolytischen AEtzen von halbleitenden Stoffen von elektrischen Halbleiterbauelementen
摘要
申请公布号
DE1230131(B)
申请公布日期
1966.12.08
申请号
DE1963H049127
申请日期
1963.05.10
申请人
HITACHI, LTD.
发明人
TOYODA KICHISABURO;NORII IKUO;NOJIRI MASAKI
分类号
C25F3/12;H01L21/3063
主分类号
C25F3/12
代理机构
代理人
主权项
地址
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