| 摘要 |
PURPOSE:To obtain N type ZnS, mass production properties thereof are excellent, by using a material, which does not react with a III group organic metal, as a reaction pipe material through which the III group organic metal is introduced. CONSTITUTION:A heater 2 is installed around a reaction pipe 1. A substrate holder 3 on which a substrate is placed is mounted into the pipe 1. Organic metal gases of a II group and a III group as an impurity are introduced from an organic metal introducing pipe 5 for the pipe 1. Hydrogen raw-material gas is introduced from a hydride raw-material introducing hole, and ZnS is grown on the heated substrate 4. An N type ZnS layer, resistivity thereof lowers, is obtained becuase the pipe 5 is made of BN. |
