| 摘要 |
Consecutively, beam deformation compensation and fine focussing and fine beam alignment are executed using an electromechanically deformed mirror surface and coarse focussing using telescopic optics and coarse beam deflection from a platform. The mirror surface is deformed in accordance with the intensity of the energy reflected. The coarse focussing and the coarse beam deflection are such that a return in the deformation in a mirror surface occurs. |
