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发明名称
ALIGNMENT APPARATUS
摘要
申请公布号
EP0096294(A3)
申请公布日期
1986.01.22
申请号
EP19830105150
申请日期
1983.05.25
申请人
HOECHST AKTIENGESELLSCHAFT
发明人
BACK, GUNTER
分类号
H01L21/30;G03F9/00;G03G13/28;H01L21/027;(IPC1-7):G03F7/20
主分类号
H01L21/30
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