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发明名称
MICROLITHOGRAPHY APPARATUS
摘要
申请公布号
JPS6187124(A)
申请公布日期
1986.05.02
申请号
JP19850160045
申请日期
1985.07.19
申请人
GCA CORP
发明人
MISHIEERU SHII KINGU
分类号
H01L21/30;G02B7/02;G02B13/24;G02B27/00;G03F7/20;G03F9/02;H01L21/027;(IPC1-7):G02B27/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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