MANUFACTURE OF FIELD EMITTER EXHIBITING HIGHLY STABLE ELECTRON EMISSION CHARACTERISTIC

摘要

PURPOSE:To obtain a field emitter having excellent current stability and electron emission characteristic by thermally treating TiC mono-crystal emitter under hydrocarbon gas to form a carbon film on the surface then applying strong field under super high vacuum. CONSTITUTION:TiC monocrystal emitter is heated under hydrocarbon gas with the temperature of 900-1,400 deg.C to form a carbon film. Then electron beam is emitted for about 30min with the total current of 10-20muA under super high vacuum for a chip formed with a carbon film on the surface to apply strong field stronger than 10<7>V/cm. Consequently, a field emitter having excellent emission performance is obtained.