METHOD FOR PLATING MOLYBDENUM BISULFIDE

摘要

PURPOSE:To plate MoS2 as a permanent lubricating agent by bringing the heated and evaporated Mo atoms which are passed in an atmosphere consisting of H<+> and S<-> obtd. by excitation decomposition of H2S by laser light and S<-> into reaction and forming an MoS2 film on the surface of a work. CONSTITUTION:Gaseous H2S 8 is introduced several Torr from the outside into a vacuum vessel 1 and a laser of <=0.26mu wavelength is introduced into an eximer laser reflecting cylinder 2 through an eximer laser incident window 4 attached to the vessel. On the other hand, Mo 5 is heated and evaporated by the laser of high energy density such as CO2 laser introduced through a CO2 laser incident window 3 in the atmosphere where H2S is dissociated to 2H<2>+S<->. The evaporated Mo atoms and S<-> are brought into reaction and the film is formed as MoS2 on the surface of the work 6. The formation of the film having the higher adhesive force is made possible by impressing a voltage 7 to the Mo 5 as the evaporating source to negative and the surface of the work 6 to positive.