发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve the collector-emitter saturating voltage without decreasing the withstand voltage in a collector region formed of uniform low impurity density layer by increasing an impurity density only under an emitter region. CONSTITUTION:A low density N-type epitaxial layer 2 is grown on a high density N-type substrate 1. Then, phosphorus is selectively diffused in the substrate 1 to increase the density in a region 3 to become the collector region under an emitter region formed later than the other collector region. Then, A P-type base region 4 is formed by diffusing boron on the collector region,and phosphorus is again diffused on the region 4 to form an N-type emitter region 5.
申请公布号 JPS61168258(A) 申请公布日期 1986.07.29
申请号 JP19850008207 申请日期 1985.01.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 SATSUMA KAZUMASA;MITARAI GORO
分类号 H01L29/73;H01L21/331;H01L29/08;H01L29/732 主分类号 H01L29/73
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