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发明名称
SINGLE ELECTRODE, MULTIPLE FREQUENCY PLASMA APPARATUS
摘要
申请公布号
EP0149089(A3)
申请公布日期
1986.09.03
申请号
EP19840114632
申请日期
1984.12.01
申请人
TEGAL CORPORATION
发明人
CELESTINO, SALVATORE A.;GORIN, GEORGES J.;HILLIKER, STEPHEN E.;POWELL, GARY B.
分类号
H01L21/205;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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