| 摘要 |
PURPOSE:To enable the heating of a raw material liquid in a short time, and the keeping of the liquid stably at a definite temperature, by heating the raw material liquid with a heater placed outside of the raw material tank ad at the same time, cooling the raw material liquid with a cooling device placed in the raw material tank. CONSTITUTION:The raw material liquid 4 stored in the raw material tank 1 furnished with a heat-insulation cover 11 is heated at a specific temperature with the exterior heater 10 placed to the bottom of the tank 1, and the raw material liquid is discharged, accompanied by the carrier gas introduced through the carrier gas inlet pipe 3, from the raw material feeding pipe 8 connected to the upper space 9 of the raw material liquid 4. In the above raw material feeding apparatus, a cooling device composed of a cooling pipe 14 furnished with a refrigerant forcing or circulating apparatus 16 is placed in the raw material tank 1 to enable the direct cooling of the raw material liquid 4. The temperature of the lower part of the raw material liquid 4 is measured by the temperature sensor 12 and the heating and cooling are controlled by a temperature-regulator 13. Excessive temperature rise can be corrected in a short time to enable the shortening of the heating time and the convection in the raw material liquid is induced to prevent the temperature distribution in the liquid and to stabilize the liquid temperature. |
