| 摘要 |
PURPOSE:To reduce a floor space and to make it possible to mount a high frequency test head in the lateral direction, by constituting an X/Y stage so that it is moved along an approximately vertical plane. CONSTITUTION:An X/Y stage is arranged in a longitudinal shape. The X stage is moved in the lateral direction along an approximately vertical plane. The X stage supports each comparatively heavy device comprising a Y stage mechanism, a Z stage and the like highly stably. For the purpose, a pair of rails RL, which is arranged in parallel with an approximately horizontal plane, is provided at the lower surface of the X stage. An X base XBS is moved, with said rails RL as guides, in the horizontal direction by the twisting pair of a twisting shaft XS, which is driven by an X driving pulses motor XDM. thus the position movement of the X base XBS is controlled highly accurately in accordance with the rotary angle of the pulse motor XDM and the twisting pitch of the twisting shaft XS. Therefore, the floor space occupied by the semiconductor wafer can be reduced. |
