| 摘要 |
PURPOSE:To prevent the yielding of a substrate to heat and to obtain a vertical anisotropic film having high holding power by providing a nonmagnetic metallic film and then forming a vertical anisotropic film thereon. CONSTITUTION:A nonmagnetic metallic film 4 is formed on an org. supporting substrate 1 and a vertical anisotropic film 3 is formed on the nonmagnetic metallic film 4. The org. supporting substrate 1 is formed with polyethylene, terephthalate, etc., the vertical anisotropic film 3 is formed as an alloy film consisting essentially of Co and Cr and the nonmagnetic metallic film 4 is formed, for example, with copper, etc. The magnetic effect on the vertical anisotropic film 3 can be eliminated by the nonmagnetic metallic film 4 and excellent heat resistance and radiating property can be obtained. Consequently, the nonmagnetic metallic film 4 functions as a protec tive film for protecting the org. supporting substrate 1 form the thermal damage when the vertical anisotropic film 3 is formed by sputtering. When the vertical anisotropic film 3 is formed, a film forming means wherein the film is kept at a specified distance from a cooling body as is the case in the two-layered structure is adopted, the temp. of sputtered particles is kept at a crytallization temp. necessary for forming the alloy film and the vertical anisotropic film 3 having high holding power can be formed.
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